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It is important to monitor carbon dioxide and hydrocarbon gases for several medical, industrial, environmental, health, and safety applications. Both gases are monitored using Infrared (IR)spectroscopy based analyzers that are typically accurate, reliable, but often complex, bulky, and expensive. Additionally hydrocarbon gases are detected with small, less expensive but less reliable catalytic and metal oxide sensors. This paper describes an IR gas sensor that integrates the discrete components typically found in an infrared gas sensor onto a single chip with MEMS (microelectromechanical system) technology. Thus providing IR gas sensing performance at the size and cost of electrochemical sensors.
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