Airglide LED Wafer System

The Airglide LED Wafer System is available in a wide base version for additional stiffness and support for larger payloads up to 50kg, over travels up to 1 full meter. Combined with industry-leading straightness, high accuracy, and velocity stability while scanning, the Airglide system is an ideal maintenance-free positioning solution for stepping or scanning applications, and is particularly well suited for laser processing of LED or semiconductor wafers. Other applications include metrology or precision imaging systems which require high accuracy step positioning moves.
The Airglide system deliver straightness to ±0.5 µm, compensated accuracy to <1 µm, and bi-directional repeatability to ±0.4 µm. Depending upon the payload, it can accelerate at 5 m/s2, provide maximum velocity of 1000 mm/s, and deliver continuous force of 76 N and peak force of 240 N over available travel ranges from 100 to 1,000mm. The system can be operated with industry-standard servo drive control hardware, or packaged with a Dover control solution to deliver fully optimized positioning performance.
Available options include complete motion rotary and z-theta products, granite base, and granite bridge, which can be integrated with the Airglide XY. When configured in a vertical orientation for use as a Z axis, a pneumatic counterbalance system can be provided. Customized pneumatic tubing and signal cabling is also available for customer-enabling technology or additional axes.