15 February 2001
This optical switch is MEMS' sliding mirror. It integrates a patented Cronos microactuator with an ultrathin, optically flat mirror element that is perpendicular to the optical plane and can move laterally across the substrate.
It latches such that when power stops, the mirror remains in its most recent position. These devices can configure in single mirror arrangements for switches and optical add/drops. The silicon micromachining fabrication approach makes it possible to easily integrate the devices with fiber or wave-guide optics.